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MEMS reliability

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MEMS reliability

Record Type:	Electronic resources : Monograph/item
Title/Author:	MEMS reliability/ by Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea.
Author:	Hartzell, Allyson L.
other author:	da Silva, Mark G.
Published:	Boston, MA :Springer Science+Business Media, LLC, : 2011.,
Description:	xiii, 291 p. :ill., digital ; : 24 cm.;
Series:	MEMS reference shelf,
Contained By:	Springer eBooks
Subject:	Microelectromechanical systems - Reliability. -
Online resource:	http://dx.doi.org/10.1007/978-1-4419-6018-4
ISBN:	9781441960184 (electronic bk.)

MEMS reliability
Hartzell, Allyson L.

MEMS reliability[electronic resource] /by Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea. - Boston, MA :Springer Science+Business Media, LLC,2011. - xiii, 291 p. :ill., digital ;24 cm. - MEMS reference shelf,1936-4407.

ISBN: 9781441960184 (electronic bk.)Subjects--Topical Terms:

318385
Microelectromechanical systems
--Reliability.

LC Class. No.: TK7875 / .H37 2011

Dewey Class. No.: 621.381

MEMS reliability
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003 Springer
005 20110627163320.0
006 m d
007 cr nn 008maaau
008 160223s2011 mau s j eng d
020 $a 9781441960184 (electronic bk.)
020 $a 9781441960177 (paper)
035 $a 978-1-4419-6017-7
050 0 4 $a TK7875 $b .H37 2011
082 0 4 $a 621.381 $2 22
090 $a TK7875 $b .H338 2011
100 1 $a Hartzell, Allyson L. $3 318382
245 1 0 $a MEMS reliability $h [electronic resource] / $c by Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea.
260 $a Boston, MA : $c 2011. $b Springer Science+Business Media, LLC,
300 $a xiii, 291 p. : $b ill., digital ; $c 24 cm.
440 0 $a MEMS reference shelf, $x 1936-4407
650 0 $a Microelectromechanical systems $x Reliability. $3 318385
650 1 4 $a Engineering. $3 120442
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 120826
700 1 $a da Silva, Mark G. $3 318383
700 1 $a Shea, Herbert R. $3 318384
710 2 $a SpringerLink (Online service) $3 120363
773 0 $t Springer eBooks
856 4 0 $u http://dx.doi.org/10.1007/978-1-4419-6018-4
950 $a Engineering (Springer-11647)

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