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Precision nanometrology = sensors an...

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Gao, Wei.

Precision nanometrology = sensors and measuring systems for nanomanufacturing /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Precision nanometrology/ by Wei Gao.
Reminder of title:	sensors and measuring systems for nanomanufacturing /
Author:	Gao, Wei.
Published:	London :Springer-Verlag London, : 2010.,
Description:	xiii, 354 p. :ill., digital ; : 24 cm.;
Series:	Springer series in advanced manufacturing,
Contained By:	Springer eBooks
Subject:	Engineering. -
Online resource:	http://dx.doi.org/10.1007/978-1-84996-254-4
ISBN:	9781849962544 (electronic bk.)

Precision nanometrology = sensors and measuring systems for nanomanufacturing /
Gao, Wei.

Precision nanometrologysensors and measuring systems for nanomanufacturing /[electronic resource] :by Wei Gao. - London :Springer-Verlag London,2010. - xiii, 354 p. :ill., digital ;24 cm. - Springer series in advanced manufacturing,1860-5168.

ISBN: 9781849962544 (electronic bk.)Subjects--Topical Terms:

120442
Engineering.

LC Class. No.: TA418.9.N35 / G36 2010

Dewey Class. No.: 620.50287

Precision nanometrology = sensors and measuring systems for nanomanufacturing /
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100 1 $a Gao, Wei. $3 366573
245 1 0 $a Precision nanometrology $h [electronic resource] : $b sensors and measuring systems for nanomanufacturing / $c by Wei Gao.
260 $a London : $c 2010. $b Springer-Verlag London,
300 $a xiii, 354 p. : $b ill., digital ; $c 24 cm.
440 0 $a Springer series in advanced manufacturing, $x 1860-5168
650 1 4 $a Engineering. $3 120442
650 2 4 $a Measurement Science and Instrumentation. $3 241500
650 2 4 $a Nanotechnology. $3 101595
650 2 4 $a Control , Robotics, Mechatronics. $3 366051
650 2 4 $a Manufacturing, Machines, Tools. $3 121185
650 0 $a Nanostructured materials $x Measurement. $3 366574
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856 4 0 $u http://dx.doi.org/10.1007/978-1-84996-254-4
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