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Multi-wafer rotating MEMS machines =...

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Multi-wafer rotating MEMS machines = turbines, generators, and engines /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Multi-wafer rotating MEMS machines/ edited by Jeffrey H. Lang.
Reminder of title:	turbines, generators, and engines /
other author:	Lang, Jeffrey H.
Published:	Boston, MA :Springer-Verlag US, : 2009.,
Description:	xiii, 456 p. :ill., digital ; : 25 cm.;
Series:	MEMS reference shelf,
Contained By:	Springer eBooks
Subject:	Engineering. -
Online resource:	http://dx.doi.org/10.1007/978-0-387-77747-4
ISBN:	9780387777474 (electronic bk.)

Multi-wafer rotating MEMS machines = turbines, generators, and engines /
Multi-wafer rotating MEMS machinesturbines, generators, and engines /[electronic resource] :edited by Jeffrey H. Lang. - Boston, MA :Springer-Verlag US,2009. - xiii, 456 p. :ill., digital ;25 cm. - MEMS reference shelf,1936-4407.

ISBN: 9780387777474 (electronic bk.)Subjects--Topical Terms:

120442
Engineering.

LC Class. No.: TK7875 / .M858 2009

Dewey Class. No.: 621.381

Multi-wafer rotating MEMS machines = turbines, generators, and engines /
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050 0 4 $a TK7875 $b .M858 2009
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245 0 0 $a Multi-wafer rotating MEMS machines $h [electronic resource] : $b turbines, generators, and engines / $c edited by Jeffrey H. Lang.
260 $a Boston, MA : $c 2009. $b Springer-Verlag US,
300 $a xiii, 456 p. : $b ill., digital ; $c 25 cm.
440 0 $a MEMS reference shelf, $x 1936-4407
650 1 4 $a Engineering. $3 120442
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 120826
650 2 4 $a Circuits and Systems. $3 120841
650 2 4 $a Electrical Engineering. $3 240619
650 2 4 $a Energy Technology. $3 240513
650 0 $a Turbomachines. $3 230641
650 0 $a Microelectromechanical systems. $3 120799
700 1 $a Lang, Jeffrey H. $3 375470
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950 $a Engineering (Springer-11647)

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