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Reactive Sputter Deposition
~
Depla, Diederik.
Reactive Sputter Deposition
Record Type:
Electronic resources : Monograph/item
Title/Author:
Reactive Sputter Deposition/ edited by Diederik Depla, Stijn Mahieu.
other author:
Mahieu, Stijn.
Published:
Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg, : 2008.,
Description:
xviii, 570 p. :ill. (some col.), digital ; : 25 cm.;
Series:
Springer Series in Materials Science,
Contained By:
Springer eBooks
Subject:
Surfaces and Interfaces, Thin Films. -
Online resource:
http://www.springerlink.com/openurl.asp?genre=book&isbn=978-3-540-76664-3
ISBN:
9783540766643 (electronic bk.)
Reactive Sputter Deposition
Reactive Sputter Deposition
[electronic resource] /edited by Diederik Depla, Stijn Mahieu. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2008. - xviii, 570 p. :ill. (some col.), digital ;25 cm. - Springer Series in Materials Science,1090933-033X ;.
ISBN: 9783540766643 (electronic bk.)Subjects--Topical Terms:
120889
Surfaces and Interfaces, Thin Films.
Dewey Class. No.: 621.38152
Reactive Sputter Deposition
LDR
:00867nmm a22002295a 4500
001
196204
003
Springer
005
20080805091502.0
006
m d
007
cr nn 008maaau
008
170626s2008 gw j eng d
020
$a
9783540766643 (electronic bk.)
020
$a
9783540766629 (paper)
035
$a
978-3-540-76662-9
082
0 4
$a
621.38152
$2
22
090
$a
TK7871.88
$b
.R281 2008
245
0 0
$a
Reactive Sputter Deposition
$h
[electronic resource] /
$c
edited by Diederik Depla, Stijn Mahieu.
260
$a
Berlin, Heidelberg :
$c
2008.
$b
Springer-Verlag Berlin Heidelberg,
300
$a
xviii, 570 p. :
$b
ill. (some col.), digital ;
$c
25 cm.
440
0
$a
Springer Series in Materials Science,
$x
0933-033X ;
$v
109
650
2 4
$a
Surfaces and Interfaces, Thin Films.
$3
120889
650
2 4
$a
Physical Chemistry.
$3
120832
650
2 4
$a
Industrial Chemistry/Chemical Engineering.
$3
120847
650
2 4
$a
Condensed Matter.
$3
120825
650
1 4
$a
Chemistry.
$3
87604
650
0
$a
Thin films.
$3
125731
650
0
$a
Cathode sputtering (Plating process)
$v
Handbooks, manuals, etc.
$3
229358
700
1
$a
Mahieu, Stijn.
$3
377743
700
1
$a
Depla, Diederik.
$3
377742
710
2
$a
SpringerLink (Online service)
$3
120363
773
0
$t
Springer eBooks
856
4 0
$u
http://www.springerlink.com/openurl.asp?genre=book&isbn=978-3-540-76664-3
950
$a
Chemistry and Materials Science (Springer-11644; ZDB-2-CMS)
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