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Gettering Defects in Semiconductors

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Perevoschikov, Victor A..

Gettering Defects in Semiconductors

Record Type:	Electronic resources : Monographic component part
Title/Author:	Gettering Defects in Semiconductors/ by Victor A. Perevoschikov, Vladimir D. Skoupov.
Author:	Perevoschikov, Victor A..
other author:	Skoupov, Vladimir D..
Published:	Berlin, Heidelberg :Springer Berlin Heidelberg, : 2005.,
Description:	xv, 386 p. :ill., digital ; : 25 cm.;
Series:	Springer Series in Advanced Microelectronics,
Contained By:	Springer e-books
Subject:	Semiconductors - Defects. -
Online resource:	http://dx.doi.org/10.1007/3-540-29499-6
ISBN:	9783540294993 (electronic bk.)

Gettering Defects in Semiconductors
Perevoschikov, Victor A..

Gettering Defects in Semiconductors[electronic resource] /by Victor A. Perevoschikov, Vladimir D. Skoupov. - Berlin, Heidelberg :Springer Berlin Heidelberg,2005. - xv, 386 p. :ill., digital ;25 cm. - Springer Series in Advanced Microelectronics,191437-0387 ;.

ISBN: 9783540294993 (electronic bk.)Subjects--Topical Terms:

125266
Semiconductors
--Defects.

LC Class. No.: QC611.6.D4 / P4713 2005

Dewey Class. No.: 621.38152

Gettering Defects in Semiconductors
LDR:00882nma a22002415a 4500 001 78646
003 Springer
005 20080605185015.0
006 m d
007 cr nn 008maaau
008 100528s2005 gw j eng d
020 $a 9783540294993 (electronic bk.)
020 $a 9783540262442 (paper)
035 $a 978-3-540-26244-2
050 0 0 $a QC611.6.D4 $b P4713 2005
082 0 0 $a 621.38152 $2 22
090 $a QC611.6.D4 $b P437 2005
100 1 $a Perevoschikov, Victor A.. $3 125931
245 1 0 $a Gettering Defects in Semiconductors $h [electronic resource] / $c by Victor A. Perevoschikov, Vladimir D. Skoupov.
260 $a Berlin, Heidelberg : $c 2005. $b Springer Berlin Heidelberg,
300 $a xv, 386 p. : $b ill., digital ; $c 25 cm.
440 0 $a Springer Series in Advanced Microelectronics, $x 1437-0387 ; $v 19
650 0 $a Semiconductors $x Defects. $3 125266
650 0 $a Semiconductors $x Materials. $3 120823
650 0 $a Getters. $3 125932
650 1 4 $a Chemistry. $3 87604
650 2 4 $a Optical and Electronic Materials. $3 120414
650 2 4 $a Industrial Chemistry/Chemical Engineering. $3 120847
700 1 $a Skoupov, Vladimir D.. $3 125930
710 2 $a SpringerLink (Online service) $3 120363
773 0 $t Springer e-books
856 4 0 $u http://dx.doi.org/10.1007/3-540-29499-6
950 $a Chemistry and Materials Science (Springer-11644; ZDB-2-CMS)

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