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Design and manufacturing of active m...
~
Hesselbach, Jurgen.
Design and manufacturing of active microsystems
Record Type:
Electronic resources : Monograph/item
Title/Author:
Design and manufacturing of active microsystems/ edited by Stephanus Buttgenbach, Arne Burisch, Jurgen Hesselbach.
other author:
Buttgenbach, Stephanus.
Published:
Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg, : 2011.,
Description:
xii, 444 p. :ill., digital ; : 24 cm.;
Series:
Microtechnology and MEMS,
Contained By:
Springer eBooks
Subject:
Microtechnology. -
Online resource:
http://dx.doi.org/10.1007/978-3-642-12903-2
ISBN:
9783642129032 (electronic bk.)
Design and manufacturing of active microsystems
Design and manufacturing of active microsystems
[electronic resource] /edited by Stephanus Buttgenbach, Arne Burisch, Jurgen Hesselbach. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2011. - xii, 444 p. :ill., digital ;24 cm. - Microtechnology and MEMS,1615-8326.
ISBN: 9783642129032 (electronic bk.)Subjects--Topical Terms:
122427
Microtechnology.
LC Class. No.: TK7874 / .D47 2011
Dewey Class. No.: 621.381
Design and manufacturing of active microsystems
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Design and manufacturing of active microsystems
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edited by Stephanus Buttgenbach, Arne Burisch, Jurgen Hesselbach.
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Berlin, Heidelberg :
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2011.
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Springer-Verlag Berlin Heidelberg,
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xii, 444 p. :
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ill., digital ;
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24 cm.
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Microtechnology and MEMS,
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Burisch, Arne.
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Chemistry and Materials Science (Springer-11644)
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