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MEMS materials and processes handbook
~
Lin, Pinyen.
MEMS materials and processes handbook
Record Type:
Electronic resources : Monograph/item
Title/Author:
MEMS materials and processes handbook/ edited by Reza Ghodssi, Pinyen Lin.
other author:
Ghodssi, Reza.
Published:
Boston, MA :Springer Science+Business Media, LLC, : 2011.,
Description:
xxxv, 1187 p. :ill., digital ; : 24 cm.;
Series:
MEMS reference shelf,
Contained By:
Springer eBooks
Subject:
Microelectromechanical systems - Materials. -
Online resource:
http://dx.doi.org/10.1007/978-0-387-47318-5
ISBN:
9780387473185 (electronic bk.)
MEMS materials and processes handbook
MEMS materials and processes handbook
[electronic resource] /edited by Reza Ghodssi, Pinyen Lin. - Boston, MA :Springer Science+Business Media, LLC,2011. - xxxv, 1187 p. :ill., digital ;24 cm. - MEMS reference shelf,1936-4407.
ISBN: 9780387473185 (electronic bk.)Subjects--Topical Terms:
316288
Microelectromechanical systems
--Materials.
LC Class. No.: TK7875 / .M46 2011
Dewey Class. No.: 621.381
MEMS materials and processes handbook
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edited by Reza Ghodssi, Pinyen Lin.
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Boston, MA :
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2011.
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Springer Science+Business Media, LLC,
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xxxv, 1187 p. :
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ill., digital ;
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24 cm.
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Microelectromechanical systems
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Engineering (Springer-11647)
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