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Nanolithography and patterning techn...
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MyiLibrary.
Nanolithography and patterning techniques in microelectronics
Record Type:
Electronic resources : Monograph/item
Title/Author:
Nanolithography and patterning techniques in microelectronics/ edited by David G. Bucknall.
other author:
Bucknall, David G.
Published:
Cambridge :CRC Press, : c2005.,
Description:
xiv, 409 p. :ill. ; : 24 cm.;
Notes:
Title from e-book title screen (viewed October 16, 2007).
Series:
Woodhead Publishing in materials
Subject:
Nanotechnology. -
Online resource:
Connect to MyiLibrary resource
ISBN:
9786610568338
Nanolithography and patterning techniques in microelectronics
Nanolithography and patterning techniques in microelectronics
[electronic resource] /edited by David G. Bucknall. - Cambridge :CRC Press,c2005. - xiv, 409 p. :ill. ;24 cm. - Woodhead Publishing in materials.
Title from e-book title screen (viewed October 16, 2007).
Includes bibliographical references and index.
Electronic reproduction.
UK :
MyiLibrary,
2007
Available via World Wide Web.
ISBN: 9786610568338
LCCN: 2006365086Subjects--Topical Terms:
101595
Nanotechnology.
Index Terms--Genre/Form:
96803
Electronic books.
LC Class. No.: TK7874 / .N318 2005eb
Dewey Class. No.: 621.3815/31
Nanolithography and patterning techniques in microelectronics
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edited by David G. Bucknall.
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24 cm.
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2007
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Available via World Wide Web.
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http://www.myilibrary.com?id=56833
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