Electroceramic-Based MEMS = Fabricat...
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  • Electroceramic-Based MEMS = Fabrication-Technology and Applications /
  • Record Type: Electronic resources : Monographic component part
    Title/Author: Electroceramic-Based MEMS/ edited by Nava Setter.
    Reminder of title: Fabrication-Technology and Applications /
    other author:
    Published: Boston, MA :Springer Science+Business Media, Inc., : 2005.,
    Description: xii, 414 p. :ill., digital ; : 25 cm.;
    Series: Electronic Materials: Science and Technology,
    Contained By: Springer e-books
    Subject: Microelectromechanical systems. -
    Online resource: http://dx.doi.org/10.1007/b101200
    ISBN: 9780387233192 (electronic bk.)
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