Languages
Baltes, H..
Overview
| Works: | 1 works in 1 publications in 1 languages | |
|---|---|---|
Titles
Integrated Chemical Microsensor Systems in CMOS Technology
by:
Fujita, Hiroyuki.; Hierlemann, Andreas.; Liepmann, Dorian.; SpringerLink (Online service); Baltes, H..
(Electronic resources)
Subjects
Electronics and Microelectronics, Instrumentation.
Measurement Science, Instrumentation.
Surfaces and Interfaces, Thin Films.
Sensorimotor integration.
Optical and Electronic Materials.
Chemistry.
Microelectromechanical systems.
Nanotechnology.
Analytical Chemistry.
Metal oxide semiconductors, Complementary.