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Franz, Gerhard.

Overview

Works:	1 works in 1 publications in 1 languages

Titles

Low pressure plasmas and microstructuring technology by: Franz, Gerhard.; SpringerLink (Online service) (Electronic resources)

Subjects

Plasma engineering. Plasma etching. Electronics and Microelectronics, Instrumentation. Surfaces and Interfaces, Thin Films. Plasma (Ionized gases)- Industrial applications. Optical and Electronic Materials. Material Science. Atomic and Molecular Structure and Spectra.

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