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Layton, Richard A.

Overview

Works:	1 works in 1 publications in 1 languages

Titles

Introductory MEMS = fabrication and applications / by: Layton, Richard A.; Adams, Thomas M.; SpringerLink (Online service) (Electronic resources)

Subjects

Electronics and Microelectronics, Instrumentation. Mechanics. Transducers. Circuits and Systems. Surfaces and Interfaces, Thin Films. Electronic apparatus and appliances. Microelectromechanical systems. Continuum Mechanics and Mechanics of Materials. Engineering.

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