新生學校財團法人新生醫護管理專科學校圖書館 |

Language: English

Login

Back

Switch To: Labeled | MARC Mode | ISBD

Thin film materials technology = spu...

~

Wasa, Kiyotaka.

Thin film materials technology = sputtering of compound materials /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Thin film materials technology/ by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi.
Reminder of title:	sputtering of compound materials /
Author:	Wasa, Kiyotaka.
other author:	Kitabatake, Makoto.
Published:	Norwich, NY :Springer, : c2004.,
Description:	xiv, 518 p. :ill. ; : 24 cm.;
Subject:	Cathode sputtering (Plating process) - Handbooks, manuals, etc. -
Online resource:	http://www.sciencedirect.com/science/book/9780815514831
ISBN:	9780815514831 (electronic bk.)

Thin film materials technology = sputtering of compound materials /
Wasa, Kiyotaka.

Thin film materials technologysputtering of compound materials /[electronic resource] :by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi. - Norwich, NY :Springer,c2004. - xiv, 518 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 9780815514831 (electronic bk.)

LCCN: 2003018016Subjects--Topical Terms:

229358
Cathode sputtering (Plating process)
--Handbooks, manuals, etc.

LC Class. No.: TS695 / .W38 2004

Dewey Class. No.: 621.3815/2

Thin film materials technology = sputtering of compound materials /
LDR:00778cmm a22002174a 45 001 129779
005 20131126173556.0
008 160105s2004 nyua sb 001 0 eng
010 $a 2003018016
020 $a 9780815514831 (electronic bk.)
020 $a 9780815514831
035 $a 13000340
040 $a DLC $c DLC $d DLC $d DLC
041 0 $a eng
042 $a pcc
050 0 0 $a TS695 $b .W38 2004
082 0 0 $a 621.3815/2 $2 22
100 1 $a Wasa, Kiyotaka. $3 229355
245 1 0 $a Thin film materials technology $h [electronic resource] : $b sputtering of compound materials / $c by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi.
260 $a Norwich, NY : $a Heidelberg : $c c2004. $b Springer, $b William Andrew Pub. ;
300 $a xiv, 518 p. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and index.
650 0 $a Cathode sputtering (Plating process) $v Handbooks, manuals, etc. $3 229358
650 0 $a Thin films. $3 125731
700 1 $a Kitabatake, Makoto. $3 229574
700 1 $a Adachi, Hideaki. $3 229575
856 4 0 $u http://www.sciencedirect.com/science/book/9780815514831

based on 0 review(s)

Multimedia

Reviews

Add a review and share your thoughts with other readers

Export

pickup library

Change password

Login