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Thin film materials technology = spu...
~
Wasa, Kiyotaka.
Thin film materials technology = sputtering of compound materials /
紀錄類型:
書目-電子資源 : 單行本
正題名/作者:
Thin film materials technology/ by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi.
其他題名:
sputtering of compound materials /
作者:
Wasa, Kiyotaka.
其他作者:
Kitabatake, Makoto.
出版者:
Norwich, NY :Springer, : c2004.,
面頁冊數:
xiv, 518 p. :ill. ; : 24 cm.;
標題:
Cathode sputtering (Plating process) - Handbooks, manuals, etc. -
電子資源:
http://www.sciencedirect.com/science/book/9780815514831
ISBN:
9780815514831 (electronic bk.)
Thin film materials technology = sputtering of compound materials /
Wasa, Kiyotaka.
Thin film materials technology
sputtering of compound materials /[electronic resource] :by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi. - Norwich, NY :Springer,c2004. - xiv, 518 p. :ill. ;24 cm.
Includes bibliographical references and index.
ISBN: 9780815514831 (electronic bk.)
LCCN: 2003018016Subjects--Topical Terms:
229358
Cathode sputtering (Plating process)
--Handbooks, manuals, etc.
LC Class. No.: TS695 / .W38 2004
Dewey Class. No.: 621.3815/2
Thin film materials technology = sputtering of compound materials /
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http://www.sciencedirect.com/science/book/9780815514831
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