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Optical diagnostics for thin film pr...
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Herman, Irving P.
Optical diagnostics for thin film processing
紀錄類型:
書目-電子資源 : 單行本
正題名/作者:
Optical diagnostics for thin film processing/ Irving P. Herman.
作者:
Herman, Irving P.
出版者:
San Diego, CA :Academic Press, : c1996.,
面頁冊數:
xxix, 783 p. :ill. ; : 24 cm.;
標題:
Spectrum analysis - Industrial applications. -
電子資源:
http://www.sciencedirect.com/science/book/9780123420701
ISBN:
9780123420701 (electronic bk.)
Optical diagnostics for thin film processing
Herman, Irving P.
Optical diagnostics for thin film processing
[electronic resource] /Irving P. Herman. - San Diego, CA :Academic Press,c1996. - xxix, 783 p. :ill. ;24 cm.
Includes bibliographical references and index.
ISBN: 9780123420701 (electronic bk.)
LCCN: 95016540 Subjects--Topical Terms:
229612
Spectrum analysis
--Industrial applications.
LC Class. No.: QC176.84.S93 / H47 1996
Dewey Class. No.: 621.3815/2/0287
Optical diagnostics for thin film processing
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http://www.sciencedirect.com/science/book/9780123420701
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