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Microfabrication for industrial appl...

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Luttge, Regina.

Microfabrication for industrial applications

Record Type:	Electronic resources : Monograph/item
Title/Author:	Microfabrication for industrial applications/ Regina Luttge.
Author:	Luttge, Regina.
Published:	Oxford ;William Andrew, : 2011.,
Description:	xvii, 289 p. :ill. ; : 24 cm.;
Subject:	Manufacturing processes. -
Online resource:	http://www.sciencedirect.com/science/book/9780815515821
ISBN:	9780815515821 (electronic bk.)

Microfabrication for industrial applications
Luttge, Regina.

Microfabrication for industrial applications[electronic resource] /Regina Luttge. - Oxford ;William Andrew,2011. - xvii, 289 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 9780815515821 (electronic bk.)

LCCN: 2011926754Subjects--Topical Terms:

121184
Manufacturing processes.

LC Class. No.: TS183 / .L88 2011

Dewey Class. No.: 620.5

Microfabrication for industrial applications
LDR:00741nmm a22002177a 45 001 129862
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008 160105s2011 enka sb 001 0 eng d
010 $a 2011926754
020 $a 9780815515821 (electronic bk.)
020 $a 9780815515821 (hbk.)
035 $a 13000423
040 $a SISPL $c SISPL $d EIK $d CDX $d YDXCP $d CAI $d DLC
041 0 $a eng
042 $a lccopycat
050 0 0 $a TS183 $b .L88 2011
082 0 4 $a 620.5 $2 23
100 1 $a Luttge, Regina. $3 229810
245 1 0 $a Microfabrication for industrial applications $h [electronic resource] / $c Regina Luttge.
260 $a Oxford ; $a Waltham, MA : $c 2011. $b William Andrew,
300 $a xvii, 289 p. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and index.
650 0 $a Manufacturing processes. $3 121184
650 0 $a Microfabrication. $3 229535
856 4 0 $u http://www.sciencedirect.com/science/book/9780815515821

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