VLSI micro- and nanophotonics = scie...
Lee, El-Hang.

 

  • VLSI micro- and nanophotonics = science, technology, and applications /
  • Record Type: Electronic resources : Monograph/item
    Title/Author: VLSI micro- and nanophotonics/ editors, El-Hang Lee ... [et al.].
    Reminder of title: science, technology, and applications /
    other author: Lee, El-Hang.
    Published: Boca Raton, FL :CRC Press, : 2010.,
    Description: 1 online resource (1 v.) :ill. :
    Subject: Microelectromechanical systems - Technological innovations. -
    Online resource: http://www.crcnetbase.com/isbn/978-1-57444-729-3
    ISBN: 9781574447293 (acid-free paper)
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