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Microlithography = science and techn...
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MyiLibrary.
Microlithography = science and technology /
紀錄類型:
書目-電子資源 : 單行本
正題名/作者:
Microlithography/ edited by Kazuaki Suzuki, Bruce W. Smith.
其他題名:
science and technology /
其他作者:
Suzuki, Kazuaki.
出版者:
Boca Raton :CRC Press, : c2007.,
面頁冊數:
848 p. :ill. ; : 27 cm.;
附註:
Title from e-book title screen (viewed October 15, 2007).
標題:
Manufacturing processes. -
電子資源:
Connect to MyiLibrary resource
ISBN:
9786610809639
Microlithography = science and technology /
Microlithography
science and technology /[electronic resource] :edited by Kazuaki Suzuki, Bruce W. Smith. - 2nd ed. - Boca Raton :CRC Press,c2007. - 848 p. :ill. ;27 cm. - Optical science and engineering ;126. - Optical science and engineering (Boca Raton, Fla.) ;131..
Title from e-book title screen (viewed October 15, 2007).
Includes bibliographical references and index.
Electronic reproduction.
UK :
MyiLibrary,
2007
Available via World Wide Web.
ISBN: 9786610809639
LCCN: 2006031516
Nat. Bib. No.: GBA696464bnb
Nat. Bib. Agency Control No.: 013602008UkSubjects--Topical Terms:
121184
Manufacturing processes.
Index Terms--Genre/Form:
96803
Electronic books.
LC Class. No.: TK7836 / .M525 2007eb
Dewey Class. No.: 621.3815/31
Microlithography = science and technology /
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