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Introductory MEMS = fabrication and ...
~
Layton, Richard A.
Introductory MEMS = fabrication and applications /
Record Type:
Electronic resources : Monograph/item
Title/Author:
Introductory MEMS/ by Thomas M. Adams, Richard A. Layton.
Reminder of title:
fabrication and applications /
Author:
Adams, Thomas M.
other author:
Layton, Richard A.
Published:
Boston, MA :Springer Science+Business Media, LLC, : 2010.,
Description:
xv, 444 p. :ill. (some col.), digital ; : 25 cm.;
Contained By:
Springer eBooks
Subject:
Continuum Mechanics and Mechanics of Materials. -
Online resource:
http://dx.doi.org/10.1007/978-0-387-09511-0
ISBN:
9780387095110 (electronic bk.)
Introductory MEMS = fabrication and applications /
Adams, Thomas M.
Introductory MEMS
fabrication and applications /[electronic resource] :by Thomas M. Adams, Richard A. Layton. - Boston, MA :Springer Science+Business Media, LLC,2010. - xv, 444 p. :ill. (some col.), digital ;25 cm.
ISBN: 9780387095110 (electronic bk.)Subjects--Topical Terms:
120837
Continuum Mechanics and Mechanics of Materials.
LC Class. No.: TK7875 / .A33 2010
Dewey Class. No.: 621.381
Introductory MEMS = fabrication and applications /
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fabrication and applications /
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by Thomas M. Adams, Richard A. Layton.
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Engineering (Springer-11647)
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