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Silicon devices and process integrat...
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El-Kareh, Badih.
Silicon devices and process integration = deep submicron and nano-scale technologies /
Record Type:
Electronic resources : Monograph/item
Title/Author:
Silicon devices and process integration/ by Badih El-Kareh.
Reminder of title:
deep submicron and nano-scale technologies /
Author:
El-Kareh, Badih.
Published:
Boston, MA :Springer US, : 2009.,
Description:
xxv, 597 p. :ill.,digital ; : 24 cm.;
Contained By:
Springer eBooks
Subject:
Circuits and Systems. -
Online resource:
http://dx.doi.org/10.1007/978-0-387-69010-0
ISBN:
9780387690100 (electronic bk.)
Silicon devices and process integration = deep submicron and nano-scale technologies /
El-Kareh, Badih.
Silicon devices and process integration
deep submicron and nano-scale technologies /[electronic resource] :by Badih El-Kareh. - Boston, MA :Springer US,2009. - xxv, 597 p. :ill.,digital ;24 cm.
ISBN: 9780387690100 (electronic bk.)Subjects--Topical Terms:
120841
Circuits and Systems.
LC Class. No.: TK7871.99.M44 / E45 2009
Dewey Class. No.: 621.3815
Silicon devices and process integration = deep submicron and nano-scale technologies /
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deep submicron and nano-scale technologies /
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2009.
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24 cm.
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Engineering (Springer-11647; ZDB-2-ENG)
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