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Low pressure plasmas and microstruct...
~
Franz, Gerhard.
Low pressure plasmas and microstructuring technology
Record Type:
Electronic resources : Monograph/item
Title/Author:
Low pressure plasmas and microstructuring technology/ by Gerhard Franz.
Author:
Franz, Gerhard.
Published:
Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg, : 2009.,
Description:
xxiv, 732 p. :ill., digital ; : 24 cm.;
Contained By:
Springer eBooks
Subject:
Electronics and Microelectronics, Instrumentation. -
Online resource:
http://dx.doi.org/10.1007/978-3-540-85849-2
ISBN:
9783540858492 (electronic bk.)
Low pressure plasmas and microstructuring technology
Franz, Gerhard.
Low pressure plasmas and microstructuring technology
[electronic resource] /by Gerhard Franz. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2009. - xxiv, 732 p. :ill., digital ;24 cm.
ISBN: 9783540858492 (electronic bk.)Subjects--Topical Terms:
120826
Electronics and Microelectronics, Instrumentation.
LC Class. No.: TA2020 / .F73 2009
Dewey Class. No.: 621.044
Low pressure plasmas and microstructuring technology
LDR
:00773nmm 2200229 a 4500
001
193305
003
Springer
005
20090818164021.0
006
m d
007
cr nn 008maaau
008
170623s2009 gw j eng d
020
$a
9783540858492 (electronic bk.)
020
$a
9783540858485 (paper)
035
$a
978-3-540-85848-5
050
1 4
$a
TA2020
$b
.F73 2009
082
0 4
$a
621.044
$2
22
090
$a
TA2020
$b
.F837 2009
100
1
$a
Franz, Gerhard.
$3
373014
245
1 0
$a
Low pressure plasmas and microstructuring technology
$h
[electronic resource] /
$c
by Gerhard Franz.
260
$a
Berlin, Heidelberg :
$c
2009.
$b
Springer-Verlag Berlin Heidelberg,
300
$a
xxiv, 732 p. :
$b
ill., digital ;
$c
24 cm.
650
2 4
$a
Electronics and Microelectronics, Instrumentation.
$3
120826
650
2 4
$a
Surfaces and Interfaces, Thin Films.
$3
120889
650
2 4
$a
Atomic and Molecular Structure and Spectra.
$3
123102
650
1 4
$a
Material Science.
$3
365129
650
2 4
$a
Optical and Electronic Materials.
$3
120414
650
0
$a
Plasma etching.
$3
373016
650
0
$a
Plasma engineering.
$3
340928
650
0
$a
Plasma (Ionized gases)
$x
Industrial applications.
$3
373015
710
2
$a
SpringerLink (Online service)
$3
120363
773
0
$t
Springer eBooks
856
4 0
$u
http://dx.doi.org/10.1007/978-3-540-85849-2
950
$a
Chemistry and Materials Science (Springer-11644)
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