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Low pressure plasmas and microstruct...
~
Franz, Gerhard.
Low pressure plasmas and microstructuring technology
紀錄類型:
書目-電子資源 : 單行本
正題名/作者:
Low pressure plasmas and microstructuring technology/ by Gerhard Franz.
作者:
Franz, Gerhard.
出版者:
Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg, : 2009.,
面頁冊數:
xxiv, 732 p. :ill., digital ; : 24 cm.;
Contained By:
Springer eBooks
標題:
Electronics and Microelectronics, Instrumentation. -
電子資源:
http://dx.doi.org/10.1007/978-3-540-85849-2
ISBN:
9783540858492 (electronic bk.)
Low pressure plasmas and microstructuring technology
Franz, Gerhard.
Low pressure plasmas and microstructuring technology
[electronic resource] /by Gerhard Franz. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2009. - xxiv, 732 p. :ill., digital ;24 cm.
ISBN: 9783540858492 (electronic bk.)Subjects--Topical Terms:
120826
Electronics and Microelectronics, Instrumentation.
LC Class. No.: TA2020 / .F73 2009
Dewey Class. No.: 621.044
Low pressure plasmas and microstructuring technology
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