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Multi-wafer rotating MEMS machines =...
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SpringerLink (Online service)
Multi-wafer rotating MEMS machines = turbines, generators, and engines /
紀錄類型:
書目-電子資源 : 單行本
正題名/作者:
Multi-wafer rotating MEMS machines/ edited by Jeffrey H. Lang.
其他題名:
turbines, generators, and engines /
其他作者:
Lang, Jeffrey H.
出版者:
Boston, MA :Springer-Verlag US, : 2009.,
面頁冊數:
xiii, 456 p. :ill., digital ; : 25 cm.;
叢書名:
MEMS reference shelf,
Contained By:
Springer eBooks
標題:
Engineering. -
電子資源:
http://dx.doi.org/10.1007/978-0-387-77747-4
ISBN:
9780387777474 (electronic bk.)
Multi-wafer rotating MEMS machines = turbines, generators, and engines /
Multi-wafer rotating MEMS machines
turbines, generators, and engines /[electronic resource] :edited by Jeffrey H. Lang. - Boston, MA :Springer-Verlag US,2009. - xiii, 456 p. :ill., digital ;25 cm. - MEMS reference shelf,1936-4407.
ISBN: 9780387777474 (electronic bk.)Subjects--Topical Terms:
120442
Engineering.
LC Class. No.: TK7875 / .M858 2009
Dewey Class. No.: 621.381
Multi-wafer rotating MEMS machines = turbines, generators, and engines /
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