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Electroceramic-Based MEMS = Fabricat...
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Electroceramic-Based MEMS = Fabrication-Technology and Applications /
紀錄類型:
書目-電子資源 : 分析款目
正題名/作者:
Electroceramic-Based MEMS/ edited by Nava Setter.
其他題名:
Fabrication-Technology and Applications /
其他作者:
出版者:
Boston, MA :Springer Science+Business Media, Inc., : 2005.,
面頁冊數:
xii, 414 p. :ill., digital ; : 25 cm.;
叢書名:
Electronic Materials: Science and Technology,
Contained By:
Springer e-books
標題:
Microelectromechanical systems. -
電子資源:
http://dx.doi.org/10.1007/b101200
ISBN:
9780387233192 (electronic bk.)
Electroceramic-Based MEMS = Fabrication-Technology and Applications /
Electroceramic-Based MEMS
Fabrication-Technology and Applications /[electronic resource] :edited by Nava Setter. - Boston, MA :Springer Science+Business Media, Inc.,2005. - xii, 414 p. :ill., digital ;25 cm. - Electronic Materials: Science and Technology,91386-3290 ;.
ISBN: 9780387233192 (electronic bk.)Subjects--Topical Terms:
120799
Microelectromechanical systems.
LC Class. No.: TK7875 / .E42 2005
Dewey Class. No.: 621.381
Electroceramic-Based MEMS = Fabrication-Technology and Applications /
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