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Shape and Functional Elements of the...

Fruhauf, Joachim.

Shape and Functional Elements of the Bulk Silicon Microtechnique = A Manual of Wet-Etched Silicon Structures /

Record Type:	Electronic resources : Monographic component part
Title/Author:	Shape and Functional Elements of the Bulk Silicon Microtechnique/ by Joachim Fruhauf.
Reminder of title:	A Manual of Wet-Etched Silicon Structures /
Author:	Fruhauf, Joachim.
Published:	Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg, : 2005.,
Description:	xii, 221 p. :ill., digital ; : 24 cm.;
Contained By:	Springer e-books
Subject:	Ceramics, Glass, Composites, Natural Methods. -
Online resource:	http://dx.doi.org/10.1007/b138230
ISBN:	9783540268765 (electronic bk.)

Shape and Functional Elements of the Bulk Silicon Microtechnique = A Manual of Wet-Etched Silicon Structures /
Fruhauf, Joachim.

Shape and Functional Elements of the Bulk Silicon MicrotechniqueA Manual of Wet-Etched Silicon Structures /[electronic resource] :by Joachim Fruhauf. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2005. - xii, 221 p. :ill., digital ;24 cm.

ISBN: 9783540268765 (electronic bk.)Subjects--Topical Terms:

120411
Ceramics, Glass, Composites, Natural Methods.

LC Class. No.: QC611.8.S5 / F48 2005

Dewey Class. No.: 620.193

Shape and Functional Elements of the Bulk Silicon Microtechnique = A Manual of Wet-Etched Silicon Structures /
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020 $a 9783540221098 (paper)
035 $a 978-3-540-22109-8
050 0 4 $a QC611.8.S5 $b F48 2005
082 0 0 $a 620.193 $2 22
090 $a QC611.8.S5 $b F944 2005
100 1 $a Fruhauf, Joachim. $3 125720
245 1 0 $a Shape and Functional Elements of the Bulk Silicon Microtechnique $h [electronic resource] : $b A Manual of Wet-Etched Silicon Structures / $c by Joachim Fruhauf.
260 $a Berlin, Heidelberg : $c 2005. $b Springer-Verlag Berlin Heidelberg,
300 $a xii, 221 p. : $b ill., digital ; $c 24 cm.
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650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 120826
650 2 4 $a Industrial Chemistry/Chemical Engineering. $3 120847
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950 $a Chemistry and Materials Science (Springer-11644; ZDB-2-CMS)

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