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Shape and Functional Elements of the...

Fruhauf, Joachim.

Shape and Functional Elements of the Bulk Silicon Microtechnique = A Manual of Wet-Etched Silicon Structures /

紀錄類型:	書目-電子資源 : 分析款目
正題名/作者:	Shape and Functional Elements of the Bulk Silicon Microtechnique/ by Joachim Fruhauf.
其他題名:	A Manual of Wet-Etched Silicon Structures /
作者:	Fruhauf, Joachim.
出版者:	Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg, : 2005.,
面頁冊數:	xii, 221 p. :ill., digital ; : 24 cm.;
Contained By:	Springer e-books
標題:	Ceramics, Glass, Composites, Natural Methods. -
電子資源:	http://dx.doi.org/10.1007/b138230
ISBN:	9783540268765 (electronic bk.)

Shape and Functional Elements of the Bulk Silicon Microtechnique = A Manual of Wet-Etched Silicon Structures /
Fruhauf, Joachim.

Shape and Functional Elements of the Bulk Silicon MicrotechniqueA Manual of Wet-Etched Silicon Structures /[electronic resource] :by Joachim Fruhauf. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2005. - xii, 221 p. :ill., digital ;24 cm.

ISBN: 9783540268765 (electronic bk.)Subjects--Topical Terms:

120411
Ceramics, Glass, Composites, Natural Methods.

LC Class. No.: QC611.8.S5 / F48 2005

Dewey Class. No.: 620.193

Shape and Functional Elements of the Bulk Silicon Microtechnique = A Manual of Wet-Etched Silicon Structures /
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