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Nanolithography and patterning techn...
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  • Nanolithography and patterning techniques in microelectronics
  • 紀錄類型: 書目-電子資源 : 單行本
    正題名/作者: Nanolithography and patterning techniques in microelectronics/ edited by David G. Bucknall.
    其他作者: Bucknall, David G.
    出版者: Cambridge :CRC Press, : c2005.,
    面頁冊數: xiv, 409 p. :ill. ; : 24 cm.;
    附註: Title from e-book title screen (viewed October 16, 2007).
    叢書名: Woodhead Publishing in materials
    標題: Microlithography. -
    電子資源: Connect to MyiLibrary resource
    ISBN: 9786610568338
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