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[ subject:"Microtechnology." ]
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Design and manufacturing of active m...
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Hesselbach, Jurgen.
Design and manufacturing of active microsystems
紀錄類型:
書目-電子資源 : 單行本
正題名/作者:
Design and manufacturing of active microsystems/ edited by Stephanus Buttgenbach, Arne Burisch, Jurgen Hesselbach.
其他作者:
Buttgenbach, Stephanus.
出版者:
Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg, : 2011.,
面頁冊數:
xii, 444 p. :ill., digital ; : 24 cm.;
叢書名:
Microtechnology and MEMS,
Contained By:
Springer eBooks
標題:
Microtechnology. -
電子資源:
http://dx.doi.org/10.1007/978-3-642-12903-2
ISBN:
9783642129032 (electronic bk.)
Design and manufacturing of active microsystems
Design and manufacturing of active microsystems
[electronic resource] /edited by Stephanus Buttgenbach, Arne Burisch, Jurgen Hesselbach. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2011. - xii, 444 p. :ill., digital ;24 cm. - Microtechnology and MEMS,1615-8326.
ISBN: 9783642129032 (electronic bk.)Subjects--Topical Terms:
122427
Microtechnology.
LC Class. No.: TK7874 / .D47 2011
Dewey Class. No.: 621.381
Design and manufacturing of active microsystems
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