Microtechnology and MEMS,

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thermal transport for applications i...
thermal transport for applications in micro/nanomachining
integrated chemical microsensor syst...
integrated chemical microsensor systems in cmos technology
electromechanical systems in microte...
electromechanical systems in microtechnology and mechatronics
design and manufacturing of active m...
design and manufacturing of active microsystems
ccd image sensors in deep-ultraviolet
ccd image sensors in deep-ultraviolet
force sensors for microelectronic pa...
force sensors for microelectronic packaging applications
piezoceramic sensors
piezoceramic sensors
piezotronics and piezo-phototronics
piezotronics and piezo-phototronics
 
 
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