MEMS Reference Shelf,

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rf mems switches and integrated swit...

rf mems switches and integrated switching circuits

bionanofluidic mems

multi-wafer rotating mems machines

silicon carbide microsystems for har...

silicon carbide microsystems for harsh environments

mems materials and processes handbook

mems reliability

radioisotope thin-film powered micro...

radioisotope thin-film powered microsystems

mems vibratory gyroscopes

photonic microsystems