Microtechnology and Mems,

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thermal transport for applications i...

thermal transport for applications in micro/nanomachining

electromechanical systems in microte...

electromechanical systems in microtechnology and mechatronics

integrated chemical microsensor syst...

integrated chemical microsensor systems in cmos technology

design and manufacturing of active m...

design and manufacturing of active microsystems

ccd image sensors in deep-ultraviolet

force sensors for microelectronic pa...

force sensors for microelectronic packaging applications

piezoceramic sensors

piezotronics and piezo-phototronics