Microelectromechanical systems.

BioNanoFluidic MEMS by: (Electronic resources)

Multi-wafer rotating MEMS machines = turbines, generators, and engines / by: (Electronic resources)

MEMS and nanotechnology-based sensors and devices for communications, medical and aerospace applications by: (Electronic resources)

The MEMS handbook by: (Electronic resources)

Radioisotope thin-film powered microsystems by: (Electronic resources)

Control technologies for emerging micro and nanoscale systems by: (Electronic resources)

Biomaterials for MEMS by: (Electronic resources)

Advanced MEMS packaging by: (Electronic resources)

Micromixers = fundamentals, design and fabrication / by: (Electronic resources)

Principles and Applications of NanoMEMS Physics by: (Electronic resources)

Handbook of silicon based MEMS = materials & technologies / by: (Electronic resources)

Introduction to microelectromechanical systems engineering by: (Electronic resources)

Introductory MEMS = fabrication and applications / by: (Electronic resources)

Low-power crystal and MEMS oscillators = the experience of watch developments / by: (Electronic resources)

Electroceramic-Based MEMS = Fabrication-Technology and Applications / by: (Electronic resources)

Mechanics of Microelectromechanical Systems by: (Electronic resources)

Integrated Chemical Microsensor Systems in CMOS Technology by: (Electronic resources)

Adhesion aspects in MEMS-NEMS by: (Electronic resources)

Photonic microsystems = micro and nanotechnology applied to optical devices and systems / by: (Electronic resources)

Photonic microresonator research and applications by: (Electronic resources)

The MEMS handbook by: (Electronic resources)

Piezoelectric-based vibration-control = from macro to micro/nano scale systems / by: (Electronic resources)

Neural networks and micromechanics by: (Electronic resources)

Silicon carbide microsystems for harsh environments by: (Electronic resources)

MEMS vibratory gyroscopes = structural approaches to improve robustness / by: (Electronic resources)

MEMS materials and processes handbook by: (Electronic resources)

Micro-drops and digital microfluidics by: (Electronic resources)