Microelectromechanical systems - Materials.

Handbook of silicon based MEMS = materials & technologies / by: (書目-電子資源)

MEMS materials and processes handbook by: (書目-電子資源)

Electronics and Microelectronics, Instrumentation.

Silicon- Electric properties.

Circuits and Systems.

Materials Science, general.

Surfaces and Interfaces, Thin Films.

Microelectromechanical systems.

Engineering.

Microelectromechanical systems- Materials.