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Microelectromechanical systems - Materials.
Overview
Works:
2 works in 2 publications in 2 languages
Titles
Handbook of silicon based MEMS = materials & technologies /
by:
(Electronic resources)
MEMS materials and processes handbook
by:
(Electronic resources)
Subjects
Electronics and Microelectronics, Instrumentation.
Silicon- Electric properties.
Circuits and Systems.
Materials Science, general.
Surfaces and Interfaces, Thin Films.
Microelectromechanical systems.
Engineering.
Microelectromechanical systems- Materials.
Processing
...
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